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Proceedings Paper

Measurement of large-scale and high-precision optics using a noncontact form-measuring probe
Author(s): Seiichiro Murai; Katsunobu Ueda; Shigeru Sakuta; Ken Ishikawa
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Paper Details

Date Published: 20 October 1992
PDF: 9 pages
Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132107
Show Author Affiliations
Seiichiro Murai, Toshiba Corp. (Japan)
Katsunobu Ueda, Toshiba Corp. (Japan)
Shigeru Sakuta, Toshiba Corp. (Japan)
Ken Ishikawa, Toshiba Corp. (Japan)


Published in SPIE Proceedings Vol. 1720:
Intl Symp on Optical Fabrication, Testing, and Surface Evaluation

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