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Proceedings Paper

Measurement of large-scale and high-precision optics using a noncontact form-measuring probe
Author(s): Seiichiro Murai; Katsunobu Ueda; Shigeru Sakuta; Ken Ishikawa
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Paper Abstract

As optica' tecimology has been improved in recent years, devekpment of large sca'e and high precision optics is atso required. For measuring these optics, a non-contact form measuring probe, with nanometer order reso'ution and a 10 pin measurement range, has been developed. The probe has been installed on the work tab'e of an ulira precision CNC machine whose X— and Z-axis tables are positioned by a laser interferometer system with 2.5 nm resolution. The probe has measured deviations between the ideal surface form and the machined surface form. By using this system, form accuracy of large sca'e workpieces, such as high precision mirrors over 300 mm diameter, could be measured with high accuracy better than 0.1 pin.

Paper Details

Date Published: 20 October 1992
PDF: 9 pages
Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); doi: 10.1117/12.132107
Show Author Affiliations
Seiichiro Murai, Toshiba Corp. (Japan)
Katsunobu Ueda, Toshiba Corp. (Japan)
Shigeru Sakuta, Toshiba Corp. (Japan)
Ken Ishikawa, Toshiba Corp. (Japan)

Published in SPIE Proceedings Vol. 1720:
Intl Symp on Optical Fabrication, Testing, and Surface Evaluation
Jumpei Tsujiuchi, Editor(s)

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