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Proceedings Paper

Imaging properties of SAM
Author(s): Siegfried Boseck
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Paper Abstract

Scanning acoustic microscopy (SAM) is a method to detect and characterize typical elastic discontinuities, which are connected with mechanical defects or electronic failures on modules and chips, actors, packages, and micromechanical tools. As the SAM can `look'' under the surface of the specimen it is able to reveal hidden structures from the inner part of the probe. Direct interpretation of the monitor image is difficult, especially when the object of investigation is unknown, as three types of contrast mechanisms have to be considered separately for all thin layers of the specimen. Additionally, each elementary layer is more or less defocussed and the superposition of all reveals a highly complicated structure on the monitor screen.

Paper Details

Date Published: 25 November 1992
PDF: 2 pages
Proc. SPIE 1844, Acousto-Optics and Applications, (25 November 1992); doi: 10.1117/12.131910
Show Author Affiliations
Siegfried Boseck, Univ. of Bremen (Germany)


Published in SPIE Proceedings Vol. 1844:
Acousto-Optics and Applications
Antoni Sliwinski; Piotr Kwiek; B. Linde; A. Markiewicz, Editor(s)

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