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Proceedings Paper

Ellipsometric tomography
Author(s): Vladmir A. Kotenev
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Paper Abstract

The method of ellipsometric tomography designed for precision measurements of complex refractive index variations in the volume of thin surface layers is considered. It is shown, that multi-wavelength ellipsometric measurements of light, reflected and scattered by the surface layer, allowed us to reconstruct its internal structure by solving a first order integral equation.

Paper Details

Date Published: 3 November 1992
PDF: 11 pages
Proc. SPIE 1843, Analytical Methods for Optical Tomography, (3 November 1992); doi: 10.1117/12.131899
Show Author Affiliations
Vladmir A. Kotenev, Institute of Physical Chemistry (Russia)


Published in SPIE Proceedings Vol. 1843:
Analytical Methods for Optical Tomography

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