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Proceedings Paper

Integrated amorphous silicon linear image sensor
Author(s): Tzung-Szu Weng; Biing-Seng Wu; Tung-Liang Lin; Hsiung-Ku Tsai; Hsiung-Kuang Chen; Sheng-Kai Hwang; Wen-Jian Lin; Mei-Soong Chen; Jin-Der Lee; In-Cha Hsieh; Jia-Shyong Cheng
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Paper Abstract

An integrated a-Si:H linear image sensor with a TFT-type photoconductor was successfully demonstrated. Each sensor element of the linear image sensor consists of a TFT-type photoconductor, a storage capacitor, and two TFT switches. All the devices were fabricated simultaneously with the same metal-insulator-semiconductor structure used for the TFTs. The characteristics of the TFT-type photoconductor and the TFTs are measured. The operation principle of the image sensor array is described; and the dynamic testing of a sensor element is discussed.

Paper Details

Date Published: 26 October 1992
PDF: 7 pages
Proc. SPIE 1814, Optical Sensors, (26 October 1992); doi: 10.1117/12.131276
Show Author Affiliations
Tzung-Szu Weng, Industrial Technology Research Institute (Taiwan)
Biing-Seng Wu, Industrial Technology Research Institute (Taiwan)
Tung-Liang Lin, Industrial Technology Research Institute (Taiwan)
Hsiung-Ku Tsai, Industrial Technology Research Institute (Taiwan)
Hsiung-Kuang Chen, Industrial Technology Research Institute (Taiwan)
Sheng-Kai Hwang, Industrial Technology Research Institute (Taiwan)
Wen-Jian Lin, Industrial Technology Research Institute (Taiwan)
Mei-Soong Chen, Industrial Technology Research Institute (Taiwan)
Jin-Der Lee, Industrial Technology Research Institute (Taiwan)
In-Cha Hsieh, Industrial Technology Research Institute (Taiwan)
Jia-Shyong Cheng, Industrial Technology Research Institute (Taiwan)


Published in SPIE Proceedings Vol. 1814:
Optical Sensors
Chih-Hong Chen; Tieh-Chu Wang, Editor(s)

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