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Proceedings Paper

Vacuum microelectronics: present status and development trends
Author(s): Marian A. Herman
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Paper Abstract

The paper presents an overview on the present status of vacuum microelectronics and discusses the development trends of this technology. The overview is based on a concise description of the manufacturing technology and on detailed discussion of the exploitation parameters of such devices as microcavity vacuum tubes, pressure sensors for robot tactile sensing, lateral vacuum microelectronic logic devices (NOR and NAND), and fluorescent displays. The paper concludes with a short presentation of the development trends in VM and current activities of OBREP Research Centre in this field.

Paper Details

Date Published: 1 August 1992
PDF: 15 pages
Proc. SPIE 1783, International Conference of Microelectronics: Microelectronics '92, (1 August 1992); doi: 10.1117/12.131051
Show Author Affiliations
Marian A. Herman, OBREP and Institute of Physics (Poland)

Published in SPIE Proceedings Vol. 1783:
International Conference of Microelectronics: Microelectronics '92
Andrzej Sowinski; Jan Grzybowski; Witold T. Kucharski; Ryszard S. Romaniuk, Editor(s)

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