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Proceedings Paper

Formation of submicron diffused layers by multipulse incoherent light treatment
Author(s): Il'dus B. Khaibullin; Yakh'ya V. Fattakhov
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Paper Abstract

In this paper the results on the formation of submicron doped layers by multipulse light treatment are presented.

Paper Details

Date Published: 1 August 1992
PDF: 5 pages
Proc. SPIE 1783, International Conference of Microelectronics: Microelectronics '92, (1 August 1992); doi: 10.1117/12.131046
Show Author Affiliations
Il'dus B. Khaibullin, Kazan Physical-Technical Institute (Russia)
Yakh'ya V. Fattakhov, Kazan Physical-Technical Institute (Russia)


Published in SPIE Proceedings Vol. 1783:
International Conference of Microelectronics: Microelectronics '92

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