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Proceedings Paper

Control and characterization of semiconductor superlattices by grazing: incidence x-ray diffraction method
Author(s): Rafik M. Imamov; O. G. Melikyan; Dmitry V. Novikov
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Paper Abstract

The report is dedicated to the application of grazing-incidence x-ray diffraction in the inclined Bragg-Laue geometry for investigation of semiconductor superlattices (SL). It is shown that it provides depth-resolved information on the SL structure and can be used for express control of SL parameters. A new x-ray spectrometer for surface structure characterization of semiconductor materials is presented.

Paper Details

Date Published: 1 August 1992
PDF: 8 pages
Proc. SPIE 1783, International Conference of Microelectronics: Microelectronics '92, (1 August 1992); doi: 10.1117/12.131045
Show Author Affiliations
Rafik M. Imamov, Institute of Crystallography (Russia)
O. G. Melikyan, Institute of Crystallography (Russia)
Dmitry V. Novikov, Institute of Crystallography (Russia)


Published in SPIE Proceedings Vol. 1783:
International Conference of Microelectronics: Microelectronics '92

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