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Proceedings Paper

Silicon pressure sensor for biomedicine applications
Author(s): Jan Dziuban; Anna Gorecka Drzazga; U. Lipowicz
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Paper Abstract

The cather-type silicon pressure sensor for biomedical application is presented. A new cutted piezoresistors configuration of the high sensitivity pressure sensor is proposed.

Paper Details

Date Published: 1 August 1992
PDF: 7 pages
Proc. SPIE 1783, International Conference of Microelectronics: Microelectronics '92, (1 August 1992); doi: 10.1117/12.131033
Show Author Affiliations
Jan Dziuban, Technical Univ. of Wroclaw (Poland)
Anna Gorecka Drzazga, Technical Univ. of Wroclaw (Poland)
U. Lipowicz, Technical Univ. of Wroclaw (Poland)

Published in SPIE Proceedings Vol. 1783:
International Conference of Microelectronics: Microelectronics '92
Andrzej Sowinski; Jan Grzybowski; Witold T. Kucharski; Ryszard S. Romaniuk, Editor(s)

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