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Proceedings Paper

Thick and thin film heaters for gas sensors
Author(s): Stanislaw Nowak; Tadeusz Pisarkiewicz
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Paper Abstract

Thick film RuO2, AuPt, and thin film Pt heaters of different shapes were manufactured to enable operation of a semiconductor gas sensor at elevated temperatures. Different bonding techniques, i.e., soldering, thermocompression, and ultracompression using Au, Pt, PtRh, Al, and Cu wires, were adopted. Surface temperature distribution was determined with the help of thermovision and point thermocouple measurements. Aging tests reveal good performance of both thick and thin film heaters at temperatures of about 300 degree(s)C. A new method of heater temperature control is described.

Paper Details

Date Published: 1 August 1992
PDF: 7 pages
Proc. SPIE 1783, International Conference of Microelectronics: Microelectronics '92, (1 August 1992); doi: 10.1117/12.131032
Show Author Affiliations
Stanislaw Nowak, Academy of Mining and Metallurgy (Poland)
Tadeusz Pisarkiewicz, Academy of Mining and Metallurgy (Poland)

Published in SPIE Proceedings Vol. 1783:
International Conference of Microelectronics: Microelectronics '92
Andrzej Sowinski; Jan Grzybowski; Witold T. Kucharski; Ryszard S. Romaniuk, Editor(s)

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