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Proceedings Paper

Microelectronic NH3 sensor on the base of poly-Si films
Author(s): Fuad J. Kasimov; O. Negodenko; V. Mamikonova; S. Ragimov
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Paper Abstract

The hybrid selective gas analyzers for NH3 concentration control with sensitive elements such as poly-Si films and MOS-transistors with threshold voltage, depending on the hydrogenous concentration level, were worked out. Resistance-to-frequency transducers on the base of cascode circuits with intrinsic positive current feedback were fabricated.

Paper Details

Date Published: 1 August 1992
PDF: 6 pages
Proc. SPIE 1783, International Conference of Microelectronics: Microelectronics '92, (1 August 1992); doi: 10.1117/12.131030
Show Author Affiliations
Fuad J. Kasimov, Institute of Space Research for Natural Resources (Azerbaijan)
O. Negodenko, Institute of Space Research for Natural Resources (Azerbaijan)
V. Mamikonova, Institute of Space Research for Natural Resources (Azerbaijan)
S. Ragimov, Institute of Space Research for Natural Resources (Azerbaijan)


Published in SPIE Proceedings Vol. 1783:
International Conference of Microelectronics: Microelectronics '92

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