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Proceedings Paper

Scan system for the subangstrom STEM
Author(s): Shengyang Ruan; Oscar H. Kapp
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Paper Abstract

A computer-controlled scan system has been completed for a sub-angstrom resolution STEM (scanning transmission electron microscope). Controlled by a PC-AT, this system is able to control beam scan, unscan, alignment, and correction of aberration. Using this system, the raster size, shape, rotation angle, and raster position may be controlled by subroutines for image generation/transformation. Computer control allows the simultaneous setting of multiple parameters allowing easy operation of the microscope and saving experimenter time.

Paper Details

Date Published: 1 August 1992
PDF: 4 pages
Proc. SPIE 1778, Imaging Technologies and Applications, (1 August 1992); doi: 10.1117/12.130963
Show Author Affiliations
Shengyang Ruan, Univ. of Chicago (United States)
Oscar H. Kapp, Univ. of Chicago (United States)


Published in SPIE Proceedings Vol. 1778:
Imaging Technologies and Applications

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