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Proceedings Paper

Polishing of CVD diamond films with abrasive liquidjets: an exploratoryinvestigation
Author(s): Mohamed Hashish; David Bothell
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Paper Abstract

An exploratory study was conducted to determine the feasibility of polishing CVD diamond films with abrasive-liquidjets. A nozzle system that produces a high-velocity radial flow (between nozzle and workpiece) with zero or near-zero impact angles was used for polishing tests. The abrasive particles are acted upon by hydrodynamic forces to effect polishing. The relatively high particle flow rates (10 g/s) and velocities (over 150 m/s) result in relatively high polishing rates. The inertial effect of the abrasive particles appears to contribute significantly to the material removal. A diamond film was polished from 3 to 1.3 microns at a rate of 2.7 micron/s/mm2 using 600-mesh SiC abrasives.

Paper Details

Date Published: 20 November 1992
PDF: 9 pages
Proc. SPIE 1759, Diamond Optics V, (20 November 1992); doi: 10.1117/12.130780
Show Author Affiliations
Mohamed Hashish, QUEST Integrated, Inc. (United States)
David Bothell, QUEST Integrated, Inc. (United States)

Published in SPIE Proceedings Vol. 1759:
Diamond Optics V
Albert Feldman; Sandor Holly, Editor(s)

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