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Proceedings Paper

Diamond CVD growth chemistry
Author(s): Wayne A. Weimer; Curtis E. Johnson
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Paper Abstract

Results accumulated in our laboratory and elsewhere suggest that a common reaction mechanism is operative in all of the diamond CVD techniques using a hydrocarbon diluted in hydrogen as the reactor gas feed composition. Detailed investigations into the chemistry involved in diamond CVD have been conducted using microwave plasma assisted CVD and DC arc jet plasma CVD reactors. Results from optical spectroscopic, mass spectrometric, electrostatic probe and kinetic model calculations support a applicability of a mechanism originally developed to describe the oxidation of methane in flames to diamond CVD. The evidence supporting this applicability along with relevant implications for future directions in diamond research will be discussed.

Paper Details

Date Published: 20 November 1992
PDF: 7 pages
Proc. SPIE 1759, Diamond Optics V, (20 November 1992); doi: 10.1117/12.130776
Show Author Affiliations
Wayne A. Weimer, Naval Air Warfare Ctr. (United States)
Curtis E. Johnson, Naval Air Warfare Ctr. (United States)


Published in SPIE Proceedings Vol. 1759:
Diamond Optics V
Albert Feldman; Sandor Holly, Editor(s)

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