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Proceedings Paper

Determination of optical constant of diamond thin films
Author(s): Xuantong Ying; Yuanhua Shen; Hang Xue; Jianhai Liu; Zhongjing Xing; Jianzhong Xu; Fengshan Zhang
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Paper Abstract

Refractive index N, extinction coefficient k, and surface roughness (alpha) of synthetic diamond thin films are strongly dependent on the growth process. The current presentation describes a multiparameter optical transmittance curve fitting method to determine refractive index n, extinction coefficient k, thickness t, and surface roughness (alpha) of synthetic CVD diamond thin films taking account optical scattering of the light by the coating surface. All the data in this method, instead of extreme values in the conventional enveloped method, of IR transmittance curve are used to fit the above properties of diamond films in a short time by specially developed computer software. The accuracy of determination can be improved.

Paper Details

Date Published: 20 November 1992
PDF: 6 pages
Proc. SPIE 1759, Diamond Optics V, (20 November 1992); doi: 10.1117/12.130775
Show Author Affiliations
Xuantong Ying, Fudan Univ. (China)
Yuanhua Shen, Fudan Univ. (China)
Hang Xue, Fudan Univ. (China)
Jianhai Liu, Fudan Univ. (China)
Zhongjing Xing, Fudan Univ. (China)
Jianzhong Xu, Shanghai Institute of Technical Physics (China)
Fengshan Zhang, Shanghai Institute of Technical Physics (China)


Published in SPIE Proceedings Vol. 1759:
Diamond Optics V
Albert Feldman; Sandor Holly, Editor(s)

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