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Proceedings Paper

Calculations of energy barriers to CVD diamond growth
Author(s): Christopher D. Latham; Malcom I. Heggie; Bob Jones
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Paper Abstract

The growth of thin diamond films by chemical vapor deposition currently in a painfully slow process with highly variable results depending on many experimental parameters. By computer modeling of processes at diamond surfaces using a local density functional cluster method, we have found substantial energy barriers (4 - 6 eV) to growth. Overall, the reactions are strongly exothermic though, thus making them irreversible. The results presented here focus on the addition of methyl radicals and acetylene molecules to {100} 2 X 1 reconstructed surfaces. We propose two possible diamond growth mechanisms in which the relatively weak reconstruction bonds have a crucial role.

Paper Details

Date Published: 20 November 1992
PDF: 10 pages
Proc. SPIE 1759, Diamond Optics V, (20 November 1992); doi: 10.1117/12.130768
Show Author Affiliations
Christopher D. Latham, Univ. of Exeter (United Kingdom)
Malcom I. Heggie, Univ. of Exeter (United Kingdom)
Bob Jones, Univ. of Exeter (United Kingdom)

Published in SPIE Proceedings Vol. 1759:
Diamond Optics V
Albert Feldman; Sandor Holly, Editor(s)

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