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Proceedings Paper

Properties of optically smooth diamond thin films produced by ECR-PACVD
Author(s): Shu Jin; Marco Fanciulli; Donald Y. Jong; Yi-Wu He; Theodore D. Moustakas
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Paper Abstract

Optically smooth diamond films were deposited on Al and Si substrates by the ECR-PACVD method. The films on Al were grown on relatively low temperatures and pressures from CH3OH/H2O and were found to have highly defective nanocrystalline structure. The films on c-Si were grown at higher temperatures and pressures from CH4/H2/O2 and were found to consist of highly oriented (100) faceted crystals. The optical constants of the diamond films on c-Si are similar to those of natural diamond.

Paper Details

Date Published: 20 November 1992
PDF: 7 pages
Proc. SPIE 1759, Diamond Optics V, (20 November 1992); doi: 10.1117/12.130766
Show Author Affiliations
Shu Jin, Boston Univ. (United States)
Marco Fanciulli, Boston Univ. (United States)
Donald Y. Jong, Boston Univ. (United States)
Yi-Wu He, Boston Univ. (United States)
Theodore D. Moustakas, Boston Univ. (United States)


Published in SPIE Proceedings Vol. 1759:
Diamond Optics V
Albert Feldman; Sandor Holly, Editor(s)

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