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Proceedings Paper

Characterization of diamond films deposited by hot-filament CVD using CF4 as doping gas by Raman spectroscopy, FTIR spectroscopy, and atomic force microscopy
Author(s): Vladimir Jesus Trava-Airoldi; C. R. Rodrigues; Masahiko Fukui; Vitor Baranauskas
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Paper Details

Date Published: 20 November 1992
PDF: 10 pages
Proc. SPIE 1759, Diamond Optics V, (20 November 1992); doi: 10.1117/12.130764
Show Author Affiliations
Vladimir Jesus Trava-Airoldi, Instituto Nacional de Pesquisas Espaciais (Brazil)
C. R. Rodrigues, State Univ. of Campinas (Brazil)
Masahiko Fukui, State Univ. of Campinas (Japan)
Vitor Baranauskas, State Univ. of Campinas (Brazil)

Published in SPIE Proceedings Vol. 1759:
Diamond Optics V
Albert Feldman; Sandor Holly, Editor(s)

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