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Proceedings Paper

Characterization of electron cyclotron resonance plasmas for diamond deposition
Author(s): Shu Jin; Richard Molnar; Donald Y. Jong; Theodore D. Moustakas
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Paper Details

Date Published: 20 November 1992
PDF: 9 pages
Proc. SPIE 1759, Diamond Optics V, (20 November 1992); doi: 10.1117/12.130760
Show Author Affiliations
Shu Jin, Boston Univ. (United States)
Richard Molnar, Boston Univ. (United States)
Donald Y. Jong, Boston Univ. (United States)
Theodore D. Moustakas, Boston Univ. (United States)

Published in SPIE Proceedings Vol. 1759:
Diamond Optics V
Albert Feldman; Sandor Holly, Editor(s)

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