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Proceedings Paper

Synthesis technique of diamondlike carbon films by laser ablation ion source in atmosphere
Author(s): Kaoru Suzuki; Tetsuya Taniyama; Junji Nakata; Takaya Masutani
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Paper Abstract

We have developed a technique of depositing a synthetic diamond-like carbon film on glass substrates in atmosphere at ambient temperature. By placing a glass substrate within the plume created by irradiating a carbon target with a Nd-YAG laser, we are able to deposit a diamond-like carbon film on the surface of the substrate. Using a highly purified graphite carbon target insures that only carbon ions are ejected and present in the plume. We will provide an analysis of the films by both vertical and diagonal irradiation (see Figs.1(A) and 1(B)), by Raman spectroscopy and electron probe micro analysis.

Paper Details

Date Published: 20 November 1992
PDF: 10 pages
Proc. SPIE 1759, Diamond Optics V, (20 November 1992); doi: 10.1117/12.130758
Show Author Affiliations
Kaoru Suzuki, Nihon Univ. (Japan)
Tetsuya Taniyama, Nihon Univ. (Japan)
Junji Nakata, Nihon Univ. (Japan)
Takaya Masutani, Nihon Univ. (Japan)

Published in SPIE Proceedings Vol. 1759:
Diamond Optics V
Albert Feldman; Sandor Holly, Editor(s)

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