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Proceedings Paper

Ion-induced fabrication of high-quality diamond particles on various substrates
Author(s): Yusuke Mori; Masahiro Deguchi; Makoto Kitabatake; Hideki Yagi; A. Hatta; T. Ito; Takashi Hirao; Akio Hiraki
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Paper Abstract

Effect of carbon implantation prior to diamond growth on diamond nucleations has been investigated for various substrates such as Si, Cu, Ti, Ni and Fe. The nucleation density is increased by one order of magnitude for carbonimplanted Si substrate via microwave plasma CVD. The diamond particles grown show well-defined (100) and (111) facets without twins or secondary nucleations. An enhancement of diamond nucleations by two orders of magnitude for carbon-implanted Cu and Ti substrates has been observed via magnet-active plasma CVD. The implanted carbon atoms seem to act as nuclei for diamond growth.

Paper Details

Date Published: 20 November 1992
PDF: 7 pages
Proc. SPIE 1759, Diamond Optics V, (20 November 1992); doi: 10.1117/12.130757
Show Author Affiliations
Yusuke Mori, Osaka Univ. (Japan)
Masahiro Deguchi, Matsushita Electric Industrial Co., Ltd. (Japan)
Makoto Kitabatake, Matsushita Electric Industrial Co., Ltd. (Japan)
Hideki Yagi, Osaka Univ. (Japan)
A. Hatta, Osaka Univ. (Japan)
T. Ito, Osaka Univ. (Japan)
Takashi Hirao, Matsushita Electric Industrial Co., Ltd. (Japan)
Akio Hiraki, Osaka Univ. (Japan)


Published in SPIE Proceedings Vol. 1759:
Diamond Optics V
Albert Feldman; Sandor Holly, Editor(s)

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