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Proceedings Paper

Advanced matrix-based algorithm for ion-beam milling of optical components
Author(s): Charles L. Carnal; Charles M. Egert; Kathy W. Hylton
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Paper Abstract

Control of an ion beam for milling optical surfaces is a nontrivial problem in two-dimensional deconvolution. The ion milling operation is performed by moving an ion beam gun through a grid of points over the surface of an optical workpiece. The control problem is to determine the amount of time to dwell at each point in the grid to obtain a desired surface profile. This research treats the problem in linear algebra terms. The required dwell times are the solutions to a large, sparse system of linear equations. Traditional factorization methods such as Gaussian elimination cannot be used because the linear equations are severely ill conditioned. Theoretically, a least-squares solution to this problem exists. Practical approaches to finding a minimal least-squares solution are discussed.

Paper Details

Date Published: 10 December 1992
PDF: 9 pages
Proc. SPIE 1752, Current Developments in Optical Design and Optical Engineering II, (10 December 1992); doi: 10.1117/12.130719
Show Author Affiliations
Charles L. Carnal, Tennessee Technological Univ. and Oak Ridge National Lab. (United States)
Charles M. Egert, Oak Ridge National Lab. (United States)
Kathy W. Hylton, Oak Ridge National Lab. (United States)

Published in SPIE Proceedings Vol. 1752:
Current Developments in Optical Design and Optical Engineering II
Robert E. Fischer; Warren J. Smith, Editor(s)

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