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Proceedings Paper

Integration of a precision stereo microscope into an excimer-laser-beam delivery system
Author(s): Paul R. Yoder
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Paper Details

Date Published: 10 December 1992
PDF: 10 pages
Proc. SPIE 1752, Current Developments in Optical Design and Optical Engineering II, (10 December 1992); doi: 10.1117/12.130714
Show Author Affiliations
Paul R. Yoder, Consultant in Optical Engineering (United States)


Published in SPIE Proceedings Vol. 1752:
Current Developments in Optical Design and Optical Engineering II
Robert E. Fischer; Warren J. Smith, Editor(s)

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