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Proceedings Paper

Solid state laser for photolithography
Author(s): Nikolay Andreev; A. A. Babin; Nikita M. Bityurin; Guerman A. Pasmanik; Efim A. Khazanov; Felix I. Feldchtein
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Paper Abstract

In present time six types or siliconorganic materials are commonly used in microelectronic. tecImolog: polysiloxanes, polysilozanes , polysilmethylenes , polysilphenylenes , organic polymers with silicon getheroathoms and polysilanes [1 ] .

Paper Details

Date Published: 1 June 1992
PDF: 18 pages
Proc. SPIE 1674, Optical/Laser Microlithography V, (1 June 1992); doi: 10.1117/12.130375
Show Author Affiliations
Nikolay Andreev, Institute of Applied Physics (Russia)
A. A. Babin, Institute of Applied Physics (Russia)
Nikita M. Bityurin, Institute of Applied Physics (Russia)
Guerman A. Pasmanik, Institute of Applied Physics and Passat Enterprise (Russia)
Efim A. Khazanov, Institute of Applied Physics (Russia)
Felix I. Feldchtein, Institute of Applied Physics (Russia)

Published in SPIE Proceedings Vol. 1674:
Optical/Laser Microlithography V
John D. Cuthbert, Editor(s)

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