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Proceedings Paper

New design of silicon organic materials and processes for microelectronics (Invited Paper)
Author(s): P. A. Averichkin; A. I. Maslakov; Kamil A. Valiev; Leonid V. Velikov
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Paper Abstract

In present time six types of siliconorganic materials are commonly used in microelectronic, technology: polysiloxanes, polysilozanes, polysilmethylenes, polysilphenylenes, organic polymers with silicon getheroathorns and polysilanes [1].

Paper Details

Date Published: 1 June 1992
PDF: 33 pages
Proc. SPIE 1674, Optical/Laser Microlithography V, (1 June 1992); doi: 10.1117/12.130374
Show Author Affiliations
P. A. Averichkin, Institute of Physics and Technology (Russia)
A. I. Maslakov, Institute of Physics and Technology (Russia)
Kamil A. Valiev, Institute of Physics and Technology (Russia)
Leonid V. Velikov, Institute of Physics and Technology (Russia)

Published in SPIE Proceedings Vol. 1674:
Optical/Laser Microlithography V
John D. Cuthbert, Editor(s)

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