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Proceedings Paper

Resolution enhancement of stepper by complementary conjugate spatial filter
Author(s): Minori N. Noguchi; Yasuhiro Yoshitake; Yukio Kembo
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Paper Details

Date Published: 1 June 1992
PDF: 7 pages
Proc. SPIE 1674, Optical/Laser Microlithography V, (1 June 1992); doi: 10.1117/12.130370
Show Author Affiliations
Minori N. Noguchi, Hitachi, Ltd. (Japan)
Yasuhiro Yoshitake, Hitachi, Ltd. (Japan)
Yukio Kembo, Hitachi, Ltd. (Japan)

Published in SPIE Proceedings Vol. 1674:
Optical/Laser Microlithography V
John D. Cuthbert, Editor(s)

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