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Proceedings Paper

Holographic mask-aligner
Author(s): Francis S. M. Clube; Simon Gray; Massoud Hamidi; Basil Arthur Omar; Denis Struchen; Jean-Claude Tisserand
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Paper Details

Date Published: 1 June 1992
PDF: 10 pages
Proc. SPIE 1674, Optical/Laser Microlithography V, (1 June 1992); doi: 10.1117/12.130368
Show Author Affiliations
Francis S. M. Clube, Holtronic Technologies (Switzerland)
Simon Gray, Holtronic Technologies (Switzerland)
Massoud Hamidi, Holtronic Technologies (Switzerland)
Basil Arthur Omar, Holtronic Technologies (Switzerland)
Denis Struchen, Holtronic Technologies (Switzerland)
Jean-Claude Tisserand, Holtronic Technologies (Switzerland)


Published in SPIE Proceedings Vol. 1674:
Optical/Laser Microlithography V
John D. Cuthbert, Editor(s)

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