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Proceedings Paper

Two-photon lithography for microelectronic application
Author(s): En-Shinn Wu; James H. Strickler; W. R. Harrell; Watt W. Webb
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Paper Details

Date Published: 1 June 1992
PDF: 7 pages
Proc. SPIE 1674, Optical/Laser Microlithography V, (1 June 1992); doi: 10.1117/12.130367
Show Author Affiliations
En-Shinn Wu, Univ. of Maryland Baltimore County (United States)
James H. Strickler, Cornell Univ. (United States)
W. R. Harrell, Microelectronics Research Lab. (United States)
Watt W. Webb, Cornell Univ. (United States)

Published in SPIE Proceedings Vol. 1674:
Optical/Laser Microlithography V
John D. Cuthbert, Editor(s)

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