Share Email Print
cover

Proceedings Paper

Resolution improvement with annular illumination
Author(s): Keiichiro Tounai; Hiroyoshi Tanabe; Hiroshi Nozue; Kunihiko Kasama
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Details

Date Published: 1 June 1992
PDF: 12 pages
Proc. SPIE 1674, Optical/Laser Microlithography V, (1 June 1992); doi: 10.1117/12.130365
Show Author Affiliations
Keiichiro Tounai, NEC Corp. (Japan)
Hiroyoshi Tanabe, NEC Corp. (Japan)
Hiroshi Nozue, NEC Corp. (Japan)
Kunihiko Kasama, NEC Corp. (Japan)


Published in SPIE Proceedings Vol. 1674:
Optical/Laser Microlithography V
John D. Cuthbert, Editor(s)

© SPIE. Terms of Use
Back to Top