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Proceedings Paper

New imaging technique for 64M-DRAM
Author(s): Naomasa Shiraishi; Shigeru Hirukawa; Yuichiro Takeuchi; Nobutaka Magome
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Paper Details

Date Published: 1 June 1992
PDF: 12 pages
Proc. SPIE 1674, Optical/Laser Microlithography V, (1 June 1992); doi: 10.1117/12.130364
Show Author Affiliations
Naomasa Shiraishi, Nikon Corp. (Japan)
Shigeru Hirukawa, Nikon Corp. (Japan)
Yuichiro Takeuchi, Nikon Corp. (Japan)
Nobutaka Magome, Nikon Corp. (Japan)


Published in SPIE Proceedings Vol. 1674:
Optical/Laser Microlithography V
John D. Cuthbert, Editor(s)

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