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Proceedings Paper

Laser-induced damage in pellicles at 193 nm
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Paper Details

Date Published: 1 June 1992
PDF: 4 pages
Proc. SPIE 1674, Optical/Laser Microlithography V, (1 June 1992); doi: 10.1117/12.130357
Show Author Affiliations
Mordechai Rothschild, Lincoln Lab./MIT (United States)
Jan H. C. Sedlacek, Lincoln Lab./MIT (United States)


Published in SPIE Proceedings Vol. 1674:
Optical/Laser Microlithography V
John D. Cuthbert, Editor(s)

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