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Proceedings Paper

Planarization of spin-coated films
Author(s): Loni M. Peurrung; David B. Graves
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Paper Details

Date Published: 1 June 1992
PDF: 7 pages
Proc. SPIE 1674, Optical/Laser Microlithography V, (1 June 1992); doi: 10.1117/12.130353
Show Author Affiliations
Loni M. Peurrung, Univ. of California/Berkeley (United States)
David B. Graves, Univ. of California/Berkeley (United States)


Published in SPIE Proceedings Vol. 1674:
Optical/Laser Microlithography V
John D. Cuthbert, Editor(s)

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