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Proceedings Paper

Shape effects of edge-line phase shifter on light intensity contrast
Author(s): Mitsunori Nakatani; Hirofumi Nakano; Haruhiko Kusunose; Kazuya Kamon; Shuichi Matsuda; Yaichiro Watakabe; Hirozo Takano; Mutuyuki Otsubo
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Paper Details

Date Published: 1 June 1992
PDF: 9 pages
Proc. SPIE 1674, Optical/Laser Microlithography V, (1 June 1992); doi: 10.1117/12.130350
Show Author Affiliations
Mitsunori Nakatani, Mitsubishi Electric Corp. (Japan)
Hirofumi Nakano, Mitsubishi Electric Corp. (Japan)
Haruhiko Kusunose, Mitsubishi Electric Corp. (Japan)
Kazuya Kamon, Mitsubishi Electric Corp. (Japan)
Shuichi Matsuda, Mitsubishi Electric Corp. (Japan)
Yaichiro Watakabe, Mitsubishi Electric Corp. (Japan)
Hirozo Takano, Mitsubishi Electric Corp. (Japan)
Mutuyuki Otsubo, Mitsubishi Electric Corp. (Japan)


Published in SPIE Proceedings Vol. 1674:
Optical/Laser Microlithography V
John D. Cuthbert, Editor(s)

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