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Proceedings Paper

Wavelength tuning for optimization of deep-UV excimer laser performance
Author(s): Susan K. Jones; Elliott Sean Capsuto; Bruce W. Dudley; Charles R. Peters; Gary C. Escher
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Paper Details

Date Published: 1 June 1992
PDF: 10 pages
Proc. SPIE 1674, Optical/Laser Microlithography V, (1 June 1992); doi: 10.1117/12.130345
Show Author Affiliations
Susan K. Jones, Microelectronics Ctr. of North Carolina (United States)
Elliott Sean Capsuto, SEMATECH (United States)
Bruce W. Dudley, Microelectronics Ctr. of North Carolina (United States)
Charles R. Peters, Microelectronics Ctr. of North Carolina (United States)
Gary C. Escher, GCA-General Signal Corp. (United States)


Published in SPIE Proceedings Vol. 1674:
Optical/Laser Microlithography V
John D. Cuthbert, Editor(s)

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