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Proceedings Paper

Polarization studies with broadband deep-UV lithography
Author(s): Birol Kuyel; Eytan Barouch; Uwe Hollerbach; Steven A. Orszag
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Paper Details

Date Published: 1 June 1992
PDF: 22 pages
Proc. SPIE 1674, Optical/Laser Microlithography V, (1 June 1992); doi: 10.1117/12.130336
Show Author Affiliations
Birol Kuyel, SEMATECH (United States)
Eytan Barouch, Princeton Univ. (United States)
Uwe Hollerbach, Princeton Univ. (United States)
Steven A. Orszag, Princeton Univ. (United States)


Published in SPIE Proceedings Vol. 1674:
Optical/Laser Microlithography V
John D. Cuthbert, Editor(s)

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