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Proceedings Paper

Deep-UV lithography for prototype 64-megabit DRAM fabrication
Author(s): Maureen A. Hanratty; Michael C. Tipton
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Paper Details

Date Published: 1 June 1992
PDF: 10 pages
Proc. SPIE 1674, Optical/Laser Microlithography V, (1 June 1992); doi: 10.1117/12.130331
Show Author Affiliations
Maureen A. Hanratty, Texas Instruments Inc. (United States)
Michael C. Tipton, Texas Instruments Inc. (United States)


Published in SPIE Proceedings Vol. 1674:
Optical/Laser Microlithography V
John D. Cuthbert, Editor(s)

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