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Proceedings Paper

Using multiple focal planes to enhance depth of focus
Author(s): Chris A. Spence; Daniel C. Cole; Barbara Peck
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Paper Details

Date Published: 1 June 1992
PDF: 11 pages
Proc. SPIE 1674, Optical/Laser Microlithography V, (1 June 1992); doi: 10.1117/12.130328
Show Author Affiliations
Chris A. Spence, IBM/General Technology Div. (United States)
Daniel C. Cole, IBM/General Technology Div. (United States)
Barbara Peck, IBM/General Technology Div. (United States)

Published in SPIE Proceedings Vol. 1674:
Optical/Laser Microlithography V
John D. Cuthbert, Editor(s)

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