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Proceedings Paper

Phase and transmission error study for the alternating-element (Levenson) phase-shifting mask
Author(s): Ahmad D. Katnani; Burn Jeng Lin
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Paper Details

Date Published: 1 June 1992
PDF: 7 pages
Proc. SPIE 1674, Optical/Laser Microlithography V, (1 June 1992); doi: 10.1117/12.130326
Show Author Affiliations
Ahmad D. Katnani, IBM/Technology Products Div. (United States)
Burn Jeng Lin, IBM/Technology Products Div. (United States)

Published in SPIE Proceedings Vol. 1674:
Optical/Laser Microlithography V
John D. Cuthbert, Editor(s)

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