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Proceedings Paper

Novel process for phase-shifting mask fabrication
Author(s): Haruhiko Kusunose; Satoshi Aoyama; Kunihiro Hosono; Susumu Takeuchi; Shuichi Matsuda; Maaike Op de Beeck; Nobuyuki Yoshioka; Yaichiro Watakabe
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Paper Details

Date Published: 1 June 1992
PDF: 11 pages
Proc. SPIE 1674, Optical/Laser Microlithography V, (1 June 1992); doi: 10.1117/12.130323
Show Author Affiliations
Haruhiko Kusunose, Mitsubishi Electric Corp. (Japan)
Satoshi Aoyama, Mitsubishi Electric Corp. (Japan)
Kunihiro Hosono, Mitsubishi Electric Corp. (Japan)
Susumu Takeuchi, Mitsubishi Electric Corp. (Japan)
Shuichi Matsuda, Mitsubishi Electric Corp. (Japan)
Maaike Op de Beeck, Mitsubishi Electric Corp. (Japan)
Nobuyuki Yoshioka, Mitsubishi Electric Corp. (Japan)
Yaichiro Watakabe, Mitsubishi Electric Corp. (Japan)


Published in SPIE Proceedings Vol. 1674:
Optical/Laser Microlithography V
John D. Cuthbert, Editor(s)

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