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Proceedings Paper

Primary processes in e-beam and laser lithographies for phase-shift mask manufacturing
Author(s): Yoichi Takahashi; Hiroshi Fujita; Hisashi Moro-oka; Masa-aki Kurihara; Kazuo Suwa; Hisatake Sano
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Paper Details

Date Published: 1 June 1992
PDF: 14 pages
Proc. SPIE 1674, Optical/Laser Microlithography V, (1 June 1992); doi: 10.1117/12.130322
Show Author Affiliations
Yoichi Takahashi, Dai Nippon Printing Co. Ltd. (Japan)
Hiroshi Fujita, Dai Nippon Printing Co. Ltd. (Japan)
Hisashi Moro-oka, Dai Nippon Printing Co. Ltd. (Japan)
Masa-aki Kurihara, Dai Nippon Printing Co. Ltd. (Japan)
Kazuo Suwa, Dai Nippon Printing Co. Ltd. (Japan)
Hisatake Sano, Dai Nippon Printing Co. Ltd. (Japan)


Published in SPIE Proceedings Vol. 1674:
Optical/Laser Microlithography V
John D. Cuthbert, Editor(s)

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