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Proceedings Paper

Effect of condenser tilt on projection images produced by a phase-shifting mask
Author(s): Tsuneo Terasawa; Norio Hasegawa; Souichi Katagiri; Katsunobu Hama
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Paper Details

Date Published: 1 June 1992
PDF: 11 pages
Proc. SPIE 1674, Optical/Laser Microlithography V, (1 June 1992); doi: 10.1117/12.130314
Show Author Affiliations
Tsuneo Terasawa, Hitachi Ltd. (Japan)
Norio Hasegawa, Hitachi Ltd. (Japan)
Souichi Katagiri, Hitachi Ltd. (Japan)
Katsunobu Hama, Hitachi Ltd. (Japan)

Published in SPIE Proceedings Vol. 1674:
Optical/Laser Microlithography V
John D. Cuthbert, Editor(s)

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