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Proceedings Paper

Three-dimensional inspection of integrated circuits: a depth from focus approach
Author(s): Xavier Binefa; Jordi M. Vitria; Juan Jose Villanueva
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Paper Details

Date Published: 1 August 1992
PDF: 7 pages
Proc. SPIE 1661, Machine Vision Applications in Character Recognition and Industrial Inspection, (1 August 1992); doi: 10.1117/12.130302
Show Author Affiliations
Xavier Binefa, Univ. Autonoma de Barcelona (Spain)
Jordi M. Vitria, Univ. Autonoma de Barcelona (Spain)
Juan Jose Villanueva, Univ. Autonoma de Barcelona (Spain)


Published in SPIE Proceedings Vol. 1661:
Machine Vision Applications in Character Recognition and Industrial Inspection
Donald P. D'Amato; Wolf-Ekkehard Blanz; Byron E. Dom; Sargur N. Srihari, Editor(s)

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