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Proceedings Paper

Calibration, setup, and performance evaluation in an IC inspection system
Author(s): Byron E. Dom; Virginia H. Brecher
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Paper Abstract

Many papers on automatic inspection systems ignore the issues of calibration, setup and performance evaluation, assuming (apparently) that they merely involve `straightforward engineering.'' In reality developing effective and robust procedures and algorithms to implement these features can be a demanding process. In fact, unbeknownst to the developers or users, the performance of many inspection systems could be significantly improved through better setup and calibration routines. In this tutorial paper we discuss both theoretical and practical issues. We start by reviewing the statistical framework underlying performance evaluation. Next we examine possible sources of inspection performance degradation. Last we describe calibration, setup and performance evaluation procedures and associated image analysis algorithms for an automated IC inspection system. While these procedures are specific to a particular system, we attempt to generalize them wherever possible.

Paper Details

Date Published: 1 August 1992
PDF: 14 pages
Proc. SPIE 1661, Machine Vision Applications in Character Recognition and Industrial Inspection, (1 August 1992); doi: 10.1117/12.130301
Show Author Affiliations
Byron E. Dom, IBM/Almaden Research Ctr. (United States)
Virginia H. Brecher, IBM/Thomas J. Watson Research Ctr. (United States)

Published in SPIE Proceedings Vol. 1661:
Machine Vision Applications in Character Recognition and Industrial Inspection
Donald P. D'Amato; Wolf-Ekkehard Blanz; Byron E. Dom; Sargur N. Srihari, Editor(s)

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