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Proceedings Paper

Efficient Fourier image analysis algorithm for aligned rectangular and trapezoidal wafer structures
Author(s): Chiao-Fe Shu; Ramesh C. Jain
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Paper Abstract

We present an efficient algorithm to compute the critical dimensions of aligned rectangular and trapezoidal wafer structures using images generated by a Fourier imaging system. We show that the Fourier images of aligned rectangular and trapezoidal structures are separable functions. This allows us to project them onto x and y coordinates and simplifies the computation process. We compute the critical dimensions of rectangular structures by estimating the distance between either peaks or zeros, or by estimating the distance between zeros for trapezoidal structures. For each projected 1-dimensional signal, we apply a zero- crossing technique to find the peaks or zeros, and then compute the critical dimensions at sub- pixel resolution.

Paper Details

Date Published: 1 August 1992
PDF: 12 pages
Proc. SPIE 1661, Machine Vision Applications in Character Recognition and Industrial Inspection, (1 August 1992); doi: 10.1117/12.130300
Show Author Affiliations
Chiao-Fe Shu, Univ. of Michigan (United States)
Ramesh C. Jain, Univ. of Michigan (United States)


Published in SPIE Proceedings Vol. 1661:
Machine Vision Applications in Character Recognition and Industrial Inspection
Donald P. D'Amato; Wolf-Ekkehard Blanz; Byron E. Dom; Sargur N. Srihari, Editor(s)

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