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Proceedings Paper

Wafer pattern inspection using a Coherent Optical Processor
Author(s): Xian-Yang Cai; Frank Kvasnik
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Paper Details

Date Published: 1 August 1992
PDF: 12 pages
Proc. SPIE 1661, Machine Vision Applications in Character Recognition and Industrial Inspection, (1 August 1992); doi: 10.1117/12.130299
Show Author Affiliations
Xian-Yang Cai, Univ. of Manchester Institute of Science and Technology (United Kingdom)
Frank Kvasnik, Univ. of Manchester Institute of Science and Technology (United Kingdom)


Published in SPIE Proceedings Vol. 1661:
Machine Vision Applications in Character Recognition and Industrial Inspection
Donald P. D'Amato; Wolf-Ekkehard Blanz; Byron E. Dom; Sargur N. Srihari, Editor(s)

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