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Proceedings Paper

Recent advances in inspecting integrated circuits for pattern defects
Author(s): Virginia H. Brecher; Byron E. Dom
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Paper Details

Date Published: 1 August 1992
PDF: 16 pages
Proc. SPIE 1661, Machine Vision Applications in Character Recognition and Industrial Inspection, (1 August 1992); doi: 10.1117/12.130296
Show Author Affiliations
Virginia H. Brecher, IBM/Thomas J. Watson Research Ctr. (United States)
Byron E. Dom, IBM/Almaden Research Ctr. (United States)


Published in SPIE Proceedings Vol. 1661:
Machine Vision Applications in Character Recognition and Industrial Inspection
Donald P. D'Amato; Wolf-Ekkehard Blanz; Byron E. Dom; Sargur N. Srihari, Editor(s)

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