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Optical Engineering

New Concepts in Projection Mask Aligners
Author(s): A. Offner
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Paper Abstract

A new concept (the annular field optical system) makes it possible to avoid the extreme complexity of conventional projection mask alignment objectives. This has been done in a new, extremely simple, all-reflecting optical system that consists of two, concentric, spherical mirrors. A monolithic block consisting of three mutually perpendicular plane mirrors is used to fold the system into a configuration that makes possible an inherently synchronous, simple scanning arrangement. Partially coherent illumination is used to increase the effective MTF without decreasing the depth of focus.

Paper Details

Date Published: 1 April 1975
PDF: 3 pages
Opt. Eng. 14(2) 142130 doi: 10.1117/12.7978742
Published in: Optical Engineering Volume 14, Issue 2
Show Author Affiliations
A. Offner, The Perkin-Elmer Corporation (United States)

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