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Optical Engineering

Development Of A Precision Diamond Turning Machine For Fabrication Of Asymmetric Aspheric Mirrors
Author(s): Shigeo Moriyama; Fumihiko Uchida; Ellchi Seya
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Paper Abstract

A high precision, numerically controlled diamond turning machine has been developed for fabrication of asymmetric aspheric mirrors, such as toroidal mirrors used in soft x-ray optics. A workpiece is machined by a single-point diamond tool fly cutter. While the cutting spindle is rotating, cutting depth can be dynamically controlled according to programmed data synchronized with the current rotation angle of the spindle. The programmed data allow generation of a generalized figure. To achieve high figure accuracy, a straightness error compensation control is incorporated with the tool slide. The machine accepts a workpiece with maximum dimensions of 600 mm by 100 mm. A figure accuracy of 0.1 Am and surface roughness of 0.03 um Rmax have been achieved.

Paper Details

Date Published: 1 November 1988
PDF: 5 pages
Opt. Eng. 27(11) 271108 doi: 10.1117/12.7976800
Published in: Optical Engineering Volume 27, Issue 11
Show Author Affiliations
Shigeo Moriyama, Hitachi, Ltd. (Japan)
Fumihiko Uchida, Hitachi, Ltd. (Japan)
Ellchi Seya, Hitachi, Ltd. (Japan)

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