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Optical Engineering

Plasma-Enhanced Chemical Vapor Deposition Of Ge-Se And Ge-S Compounds
Author(s): D. Blanc; J. I.B. Wilson
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Paper Abstract

We describe plasma-enhanced chemical vapor deposition for decomposing liquid chlorides and gaseous hydrides to yield Ge-Se and Ge-S glasses. We discuss deposition conditions for both nonisothermal glow discharge plasmas and isothermal high temperature plasmas. Our samples were examined by optical, thermal, and structural analysis to check their compositions, glass transition temperatures, and degree of microcrystallinity.

Paper Details

Date Published: 1 October 1988
PDF: 5 pages
Opt. Eng. 27(10) 271017 doi: 10.1117/12.7976784
Published in: Optical Engineering Volume 27, Issue 10
Show Author Affiliations
D. Blanc, Heriot-Watt University (Scotland)
J. I.B. Wilson, Heriot-Watt University (Scotland)


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