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Optical Engineering

Laser Measurement System For Precise And Fast Positioning
Author(s): Sadao Mori; Toshio Akatsu; Chuuichi Miyazaki
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Paper Abstract

A laser measurement system for precise and fast positioning of an object has been developed. When the object speed is low, the movement of the object is measured by comparing the phase change of a light beam reflected by the object with the phase modulated by an electro-optic crystal (an active device by which the optical phase can be controlled by the application of a voltage). When the object speed is high, the movement is measured by a fringe counting technique. The system achieves an accuracy of 4 nm and a maximum allowable measurement speed of 1100 mm/s.

Paper Details

Date Published: 1 September 1988
PDF: 7 pages
Opt. Eng. 27(9) doi: 10.1117/12.7976768
Published in: Optical Engineering Volume 27, Issue 9
Show Author Affiliations
Sadao Mori, Hitachi Mechanical Engineering Research Laboratory (Japan)
Toshio Akatsu, Hitachi Mechanical Engineering Research Laboratory (Japan)
Chuuichi Miyazaki, Hitachi Mechanical Engineering Research Laboratory (Japan)


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