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Optical Engineering

Development Of A Compact Synchrotron Radiation System For X-Ray Lithography
Author(s): Hiroshi Takada; Kouhei Furukawa; Takio Tomimasu
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Paper Details

Date Published: 1 July 1988
PDF: 7 pages
Opt. Eng. 27(7) doi: 10.1117/12.7976721
Published in: Optical Engineering Volume 27, Issue 7
Show Author Affiliations
Hiroshi Takada, Sumitomo Electric Industries, Ltd. (Japan)
Kouhei Furukawa, Sumitomo Electric Industries, Ltd. (Japan)
Takio Tomimasu, Ministry of International Trade and Industry (Japan)

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